SCOPUS 정보 검색 플랫폼

Current Applied Physics

Volumn 11, Issue 5 SUPPL., 2011, Pages

A brief review of dual-frequency capacitively coupled discharges

(5) Bi, Zhen Hua a Liu, Yong Xin a Jiang, Wei b Xu, Xiang a Wang, You Nian a

a DALIAN UNIVERSITY OF TECHNOLOGY (China)

b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY (China)

Author keywords

DF CCP; EM effect; Experimental diagnostics; Hybrid model; PIC MC model

Indexed keywords

CAPACITIVELY COUPLED DISCHARGES; CAPACITIVELY COUPLED PLASMAS; DF CCP; DUAL FREQUENCY; EM EFFECT; EXPERIMENTAL DIAGNOSTICS; HYBRID MODEL; LARGE SURFACE AREA; LOW COSTS; SEMI-CONDUCTOR; THIN-FILM DEPOSITIONS;

DEPOSITION; FLAT PANEL DISPLAYS; SURFACE DEFECTS;

ELECTRIC DISCHARGES;

EID: 81155131093 PISSN: 15671739 EISSN: None Source Type: Journal
DOI: 10.1016/j.cap.2011.07.002 Document Type: Conference Paper

Times cited : (43)

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