Simulations of dual rf-biased sheaths and ion energy distributions arriving at a dual rf-biased electrode

Physics of Plasmas

Volumn 12, Issue 12, 2005, Pages 1-8

  Guan, Zhen Qun ^a   Dai, Zhong Ling ^a   Wang, You Nian ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DYNAMICS; EQUIVALENT CIRCUITS; HYDRODYNAMICS;

ION ENERGY DISTRIBUTIONS (IED); PHASE DIFFERENCE; SHEATH STRUCTURE;

PLASMA SHEATHS;

EID: 29544437322     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2142247     Document Type: Article

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