Three-dimensional model of magnetized capacitively coupled plasmas

Journal of Applied Physics

Volumn 105, Issue 10, 2009, Pages

  Rauf, Shahid ^a   Kenney, Jason ^a   Collins, Ken ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVELY COUPLED PLASMAS; CHAMBER CENTER; DRIFT DIRECTION; ELECTRON CONFINEMENT; HIGH FREQUENCY; MAGNETIC FIELD LINE; MAGNETIC FIELD PARALLEL; NONUNIFORM MAGNETIC FIELDS; PLASMA MODEL; PLASMA POTENTIAL; THREE-DIMENSIONAL MODEL; VERY HIGH FREQUENCY;

ELECTRODES; INDUCTIVELY COUPLED PLASMA; MAGNETIC FIELDS; PLASMA CONFINEMENT; PLASMA DENSITY; THREE DIMENSIONAL;

ELECTRIC DISCHARGES;

EID: 66549108978     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3126718     Document Type: Article

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