A self-consistent hybrid model of a dual frequency sheath: Ion energy and angular distributions

Physics of Plasmas

Volumn 14, Issue 1, 2007, Pages

  Dai, Zhong Ling ^a   Xu, Xiang ^a   Wang, You Nian ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR DISTRIBUTION; ELECTRIC POTENTIAL; MATHEMATICAL MODELS; MONTE CARLO METHODS; PLASMA COLLISION PROCESSES;

CIRCUIT MODEL; GAS PRESSURE; ION ENERGY; ION ENERGY DISTRIBUTIONS (IED);

PLASMA SHEATHS;

EID: 34047101245     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2434250     Document Type: Article

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