PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect

Journal of Physics D: Applied Physics

Volumn 42, Issue 2, 2009, Pages

  Donko Z ^a   Schulze, J ^b   Heil, B G ^b,c   Czarnetzki, U ^b  

^a INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^b RUHR UNIVERSITY BOCHUM   (Germany)

^c Richardt Patents and Trademarks ^*  (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; IONS; PLASMA DIAGNOSTICS; TIME SERIES;

APPLIED VOLTAGES; CAPACITIVELY COUPLED; DRIVING VOLTAGES; DUAL FREQUENCIES; ELECTRODE GAPS; EVEN HARMONICS; FUNDAMENTAL FREQUENCIES; ION ENERGIES; ION FLUXES; LINEAR FUNCTIONS; LOW PRESSURE DISCHARGES; PARTICLE -IN-CELL SIMULATIONS; PHASE ANGLES; PIC SIMULATIONS; PLASMA SERIES RESONANCES; RADIO FREQUENCIES; SELF BIAS; VOLTAGE WAVEFORMS;

ELECTRIC DISCHARGES;

EID: 63649163274     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/2/025205     Document Type: Article

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