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Volumn 10, Issue 11, 2003, Pages 4545-4551

Analytic model for a dual frequency capacitive discharge

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CARRIER CONCENTRATION; ELECTRONS; IONS; MATHEMATICAL MODELS; NUMERICAL ANALYSIS; PLASMA DENSITY; POISSON EQUATION; REDUCTION;

EID: 0344980603     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1621000     Document Type: Article
Times cited : (136)

References (25)
  • 9
    • 0345323710 scopus 로고    scopus 로고
    • Dual radio-frequency discharges: Effective frequency concept
    • (submitted)
    • H. C. Kim, J. K. Lee, and J. W. Shon, "Dual radio-frequency discharges: effective frequency concept," Appl. Phys. Lett. (submitted).
    • Appl. Phys. Lett.
    • Kim, H.C.1    Lee, J.K.2    Shon, J.W.3
  • 18
    • 0346935299 scopus 로고    scopus 로고
    • The mode transition for power dissipation induced by driving frequency in capacitively coupled plasma
    • (to be published)
    • S. J. You, H. C. Kim, C. W. Chung, H. Y. Chang, and J. K. Lee, "The mode transition for power dissipation induced by driving frequency in capacitively coupled plasma," J. Appl. Phys. (to be published).
    • J. Appl. Phys.
    • You, S.J.1    Kim, H.C.2    Chung, C.W.3    Chang, H.Y.4    Lee, J.K.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.