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Volumn 10, Issue 11, 2003, Pages 4545-4551
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Analytic model for a dual frequency capacitive discharge
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Author keywords
[No Author keywords available]
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Indexed keywords
BOUNDARY CONDITIONS;
CARRIER CONCENTRATION;
ELECTRONS;
IONS;
MATHEMATICAL MODELS;
NUMERICAL ANALYSIS;
PLASMA DENSITY;
POISSON EQUATION;
REDUCTION;
CAPACITIVE COUPLED PLASMAS;
FREQUENCY CAPACITIVE DISCHARGE;
RADIO FREQUENCY DISCHARGES;
PLASMA THEORY;
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EID: 0344980603
PISSN: 1070664X
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1621000 Document Type: Article |
Times cited : (136)
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References (25)
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