Experimental observation of the inductive electric field and related plasma nonuniformity in high frequency capacitive discharge

Applied Physics Letters

Volumn 93, Issue 3, 2008, Pages

  Ahn, S K ^a   Chang, H Y ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DISCHARGE (FLUID MECHANICS); ELECTRIC FIELD EFFECTS; ELECTRIC FIELDS; ELECTROMAGNETIC FIELD THEORY; ELECTROMAGNETIC FIELDS; ELECTROMAGNETISM; FLUID MECHANICS; INERT GASES; MAGNETIC FIELDS; PLASMAS;

AMERICAN INSTITUTE OF PHYSICS (AIP); CAPACITIVE DISCHARGES; ELECTROMAGNETIC EFFECTS; EXPERIMENTAL OBSERVATIONS; HIGH PRESSURE OPERATIONS; HIGH-FREQUENCY (HF); INDUCTIVE DISCHARGES; LANGMUIR; LARGE AREAS; MODE TRANSITIONS; PLASMA NON-UNIFORMITY; PROBE MEASUREMENTS; RADIAL DIRECTIONS; TIME-VARYING MAGNETIC FIELDS;

ELECTRIC DISCHARGES;

EID: 48249136232     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2965118     Document Type: Article

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