Numerical investigation of dual frequency capacitively coupled hydrogen plasmas

Plasma Sources Science and Technology

Volumn 14, Issue 2, 2005, Pages

  Salabaş, Aurel ^a   Brinkmann, Ralf Peter ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOCIATION; ELECTRIC FIELDS; ELECTRODES; FLUID DYNAMICS; HYDROGEN; INTEGRAL EQUATIONS; IONIZATION; MATHEMATICAL MODELS; NATURAL FREQUENCIES; POISSON EQUATION; TWO DIMENSIONAL;

CAPACITIVELY COUPLED HYDROGEN PLASMAS; SHEATH DYNAMICS; SHEATH THICKNESS; TWO-DIMENSIONAL FLUID MODEL;

INDUCTIVELY COUPLED PLASMA;

EID: 18744394668     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/14/2/S07     Document Type: Article

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