Heating mechanisms and particle flow balancing of capacitively coupled plasmas driven by combined dc/rf sources

Physics of Plasmas

Volumn 15, Issue 3, 2008, Pages

  Jiang, Wei ^a   Xu, Xiang ^a   Dai, Zhong Ling ^a   Wang, You Nian ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; HEATING; MONTE CARLO METHODS; PLASMA DENSITY; RANDOM PROCESSES;

PARTICLE FLOW BALANCING; STOCHASTIC HEATING;

PLASMAS;

EID: 41549149111     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2888516     Document Type: Article

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