Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas

Applied Physics Letters

Volumn 89, Issue 26, 2006, Pages

  Gans, T ^a,c   Schulze, J ^a   O'Connell, D ^a   Czarnetzki, U ^a   Faulkner, R ^b   Ellingboe, A R ^b   Turner, M M ^b  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b DUBLIN CITY UNIVERSITY   (Ireland)

^c QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT EMISSION; NATURAL FREQUENCIES; OPTICAL VARIABLES MEASUREMENT; PLASMA DENSITY; PLASMAS; SPECTROSCOPIC ANALYSIS;

FREQUENCY COUPLING; ION ENERGY; IONIZATION DYNAMICS; PHASE RESOLVED OPTICAL EMISSION SPECTROSCOPY;

PLASMA DEVICES;

EID: 33846113352     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2425044     Document Type: Article

References (14)

1. E. Kawamura, M. A. Lieberman, and A. J. Lichtenberg, Phys. Plasmas 13, 053506 (2006).
2. T. Kitajima, Y. Takeo, Z. Lj. Petrovic, and T. Makabe, Appl. Phys. Lett. 77, 489 (2000).
3. T. Denda, Y. Miyoshi, Y. Komukai, T. Goto, Z. Lj. Petrovic, and T. Makabe, J. Appl. Phys. 95, 870 (2004).
4. P. C. Boyle, A. R. Ellingboe, and M. M. Turner, J. Phys. D 37, 697 (2004).
5. P. C. Boyle, A. R. Ellingboe, and M. M. Turner, Plasma Sources Sci. Technol. 13, 493 (2004).
6. H. C. Kim and J. K. Lee, Phys. Rev. Lett. 93, 085003 (2004).
7. J. Robiche, P. C. Boyle, M. M. Turner, and A. R. Ellingboe, J. Phys. D 36, 1810 (2003).
8. H. C. Kim, J. K. Lee, and J. W. Shon, Phys. Plasmas 10, 4545 (2003).
9. M. M. Turner and P. Chabert, Phys. Rev. Lett. 96, 205001 (2006).
10. S. K. Karkari and A. R. Ellingboe, Appl. Phys. Lett. 88, 101501 (2006).
11. A. R. Ellingboe, R. W. Boswell, J. P. Booth, and N. Sadeghi, Phys. Plasmas 2, 6 (1996).
12. T. Gans, V. Schulz-von der Gathen, and H. F. Döbele, Contrib. Plasma Phys. 44, 535 (2004).
13. T. Gans, V. Schulz-von der Gathen, and H. F. Döbele, Europhys. Lett. 66, 232 (2004).
14. T. Gans, Chun C. Lin, V. Schulz-von der Gathen, and H. F. Döbele, Phys. Rev. A 67, 012707 (2003).