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Volumn 18, Issue 2, 2009, Pages
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Control of ion energy distribution in low-pressure and triple-frequency capacitive discharge
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Author keywords
[No Author keywords available]
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Indexed keywords
ANALYTICAL CALCULATION;
ANALYTICAL MODEL;
ARGON PLASMAS;
CAPACITIVE DISCHARGES;
CAPACITIVELY COUPLED PLASMA REACTORS;
CAPACITIVELY COUPLED PLASMAS;
CURRENT-DRIVEN;
EFFECTIVE VOLTAGE;
FREQUENCY RATIOS;
FREQUENCY SOURCE;
HIGH FREQUENCY HF;
INDEPENDENT CONTROL;
ION BOMBARDMENT ENERGY;
ION ENERGIES;
ION ENERGY DISTRIBUTION FUNCTIONS;
ION ENERGY DISTRIBUTIONS;
ION FLUXES;
MONTE CARLO COLLISION;
PARTICLE-IN-CELL;
PLASMA POTENTIAL;
RF DISCHARGE;
SIMULATION RESULT;
SINGLE-FREQUENCY;
VOLTAGE RATIOS;
ARGON;
CURRENT DENSITY;
DISTRIBUTION FUNCTIONS;
ELECTRIC DISCHARGES;
ELECTRIC POWER DISTRIBUTION;
INDUCTIVELY COUPLED PLASMA;
ION BEAMS;
IONS;
PLASMA SOURCES;
SIGNAL INTERFERENCE;
SIMULATORS;
SWITCHING;
ION BOMBARDMENT;
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EID: 67649861012
PISSN: 09630252
EISSN: 13616595
Source Type: Journal
DOI: 10.1088/0963-0252/18/2/025024 Document Type: Article |
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Times cited : (44)
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References (17)
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