Spectroscopic study on rotational and vibrational temperature of N2 and N2+ in dual-frequency capacitively coupled plasma

Physics of Plasmas

Volumn 15, Issue 11, 2008, Pages

  Huang, Xiao Jiang ^a   Xin, Yu ^a   Yang, Lei ^a   Yuan, Quan Hua ^a   Ning, Zhao Yuan ^a  

^a SOOCHOW UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SPECTROSCOPY; DISCHARGE (FLUID MECHANICS); ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; INDUCTIVELY COUPLED PLASMA; MOLECULAR SPECTROSCOPY; PLASMAS; SPECTROSCOPIC ANALYSIS;

CAPACITIVELY COUPLED PLASMAS; DUAL FREQUENCIES; FIRST NEGATIVE SYSTEMS; GAS PRESSURES; HF POWERS; HIGH FREQUENCIES; INPUT POWERS; LF POWERS; LOW FREQUENCIES; MOLECULAR EMISSIONS; OPTICAL SPECTRUMS; POSITIVE SYSTEMS; ROTATIONAL TEMPERATURES; SPECTROSCOPIC STUDIES; VIBRATIONAL TEMPERATURES;

OPTICAL EMISSION SPECTROSCOPY;

EID: 57049159755     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3025826     Document Type: Article

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