Dually driven radio frequency plasma simulation with a three moment model

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 4, 1998, Pages 2162-2172

  Kim, Heon Chang ^a   Manousiouthakis, Vasilios I ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0141911865     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581324     Document Type: Article

References (23)

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