A method for computing ion energy distributions for multifrequency capacitive discharges

Journal of Applied Physics

Volumn 101, Issue 5, 2007, Pages

  Wu, Alan C F ^a   Lieberman, M A ^b   Verboncoeur, J P ^a  

^a Etcheverry Hall MCI 730   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; MATHEMATICAL MODELS;

CAPACITIVE DISCHARGES; ION ENERGY DISTRIBUTION (IED); ION ENERGY RESPONSE; SHEATH VOLTAGE;

TRANSFER FUNCTIONS;

EID: 33947403239     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2435975     Document Type: Article

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