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Journal of Applied Physics

Volumn 108, Issue 4, 2010, Pages

Phase-shift effect in capacitively coupled plasmas with two radio frequency or very high frequency sources

(4) Xu, Xiang a Zhao, Shu Xia a Zhang, Yu Ru a Wang, You Nian a

a DALIAN UNIVERSITY OF TECHNOLOGY (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON DISCHARGES; BOTTOM ELECTRODES; CAPACITIVE DISCHARGES; CAPACITIVELY COUPLED PLASMA REACTORS; CAPACITIVELY COUPLED PLASMAS; DISCHARGE PARAMETERS; EDGE EFFECT; ELECTROMAGNETIC EFFECTS; PHASE DIFFERENCE; PLASMA UNIFORMITY; RADIO FREQUENCIES; RADIO FREQUENCY DISCHARGES; STANDING WAVE EFFECTS; TWO DIMENSIONAL FLUID MODEL; VERY HIGH FREQUENCY;

ARGON; ELASTIC WAVES; ELECTROMAGNETISM; INDUCTIVELY COUPLED PLASMA; MAXWELL EQUATIONS; PHASE SHIFT; PLASMA APPLICATIONS; PLASMA DENSITY; PLASMA THEORY; RADIO; RADIO WAVES; ROADS AND STREETS; WAVE EFFECTS;

ELECTRIC DISCHARGES;

EID: 77956311740 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3475376 Document Type: Conference Paper

Times cited : (24)

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