Collisionless heating in radio-frequency discharges: A review

Journal of Physics D: Applied Physics

Volumn 42, Issue 19, 2009, Pages

  Turner, M M ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE DISCHARGES; COLLISIONLESS; DOMINANT MECHANISM; ELECTRON HEATING; LOW PRESSURES; PRESSURE REGIME; PROXIMATE CAUSE; RADIO FREQUENCY DISCHARGES;

HEATING;

EID: 70350650380     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/19/194008     Document Type: Review

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