|
|
Volumn 37, Issue 22, 2004, Pages 3117-3120
|
|
A simple model of an asymmetric capacitive plasma with dual frequency
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
APPROXIMATION THEORY;
CAPACITANCE;
ELECTRIC DISCHARGES;
ELECTRIC POTENTIAL;
HARMONIC ANALYSIS;
INTEGRATION;
MATHEMATICAL MODELS;
MICROELECTRODES;
MICROELECTRONICS;
NATURAL FREQUENCIES;
CAPACITIVE PLASMA;
DUAL FREQUENCY;
ION ENERGY;
ION FLUX;
INDUCTIVELY COUPLED PLASMA;
|
|
EID: 9944259885
PISSN: 00223727
EISSN: None
Source Type: Journal
DOI: 10.1088/0022-3727/37/22/009 Document Type: Article |
|
Times cited : (17)
|
|
References (7)
|
