Capacitive discharges driven by combined dc/rf sources

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 5, 2007, Pages 1456-1474

  Kawamura, E ^a   Lieberman, M A ^a   Lichtenberg, A J ^a   Hudson, E A ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAM RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIAS VOLTAGE; CARRIER CONCENTRATION; COMPUTER SIMULATION; ELECTROCHEMICAL ELECTRODES; PLASMA SHEATHS; VOLTAGE CONTROL;

CAPACITIVE DISCHARGES; NEGATIVELY BIASED ELECTRODES; SHEATH VOLTAGES;

ELECTRIC DISCHARGES;

EID: 34548205754     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2771561     Document Type: Article

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