Effect of radio-frequency power levels on electron density in a confined two-frequency capacitively-coupled plasma processing tool

Applied Physics Letters

Volumn 88, Issue 10, 2006, Pages

  Karkari, S K ^a   Ellingboe, A R ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; COMPUTER SIMULATION; ION BOMBARDMENT; MIXTURES; NATURAL FREQUENCIES; RADIO WAVES;

FLOATING HAIRPIN RESONANCE PROBE; GAS MIXTURES; PARTICLE-IN-CELL SIMULATION; PLASMA PROCESSING TOOL;

PLASMAS;

EID: 33644924060     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2182073     Document Type: Article

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