Particle-in-cell Monte-Carlo simulation of capacitive RF discharges: Comparison with experimental data

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 4 A, 2005, Pages 1957-1958

  Kim, Hyun Chul ^a   Manuilenko, Oleg ^a   Lee, Jae Koo ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

Comparison with experiment; Electron density; Electron energy probability function; Electron temperature; Particle in cell Monte Carlo method

Indexed keywords

CARRIER CONCENTRATION; COMPUTER SIMULATION; ELECTRIC FIELDS; MONTE CARLO METHODS; PLASMAS; PROBABILITY;

COMPARISON WITH EXPERIMENTS; ELECTRON ENERGY PROBABILITY FUNCTION (EEPF); ELECTRON TEMPERATURE; PARTICLE-IN-CELL (PIC)/MONTE CARLO METHOD;

ELECTRIC DISCHARGES;

EID: 21244474399     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.1957     Document Type: Article

References (13)

1. H. C. Kim and J. K. Lee: Phys. Rev. Lett. 93 (2004) 085003.
2. H. C. Kim, J. K. Lee and J. W. Shon: Appl. Phys. Lett. 84 (2004) 864.
3. V. A. Godyak and R. B. Piejak: Phys. Rev. Lett. 65 (1990) 996.
4. M. A. Mansour ElSabbagh, H. Koyama, M. D. Bowden, K. Uchino and K. Muraoka: Jpn. J. Appl. Phys. 40 (2001) 1465.
5. M. A. Mansour ElSabbagh: Ph.D. thesis, Kyushu University, Japan, 2002.
6. J. P. Verboncoeur, M. V. Alves, V. Vahedi and C. K. Birdsall: J. Comput. Phys. 104 (1993) 321.
7. C. K. Birdsall: IEEE Trans. Plasma. Sci. 19 (1991) 65.
8. E. Kawamura, C. K. Birdsall and V. Vahedi: Plasma Sources Sci. Technol. 9 (2000) 413.
9. V. Vahedi, C. K. Birdsall, M. A. Lieberman, G. DiPeso and T. D. Rognlien: Plasma Sources Sci. Technol. 2 (1993) 261.
10. W. N. G. Hitchon: Plasma Processes for Semiconductor Fabrication (Cambridge University Press, Cambridge, 1999) p. 161.
11. C. K. Birdsall and A. B. Langdon: Plasma Physics Via Computer Simulation (Adam Hilger, New York, 1991) p. 437.
12. V. Vahedi, C. K. Birdsall, M. A. Lieberman, G. DiPeso and T. D. Rognlien: Plasma Sources Sci. Technol. 2 (1993) 273.
13. I. V. Schweigert and V. A. Schweigert: Plasma Sources Sci. Technol. 13 (2004) 315.