Implicit and electrostatic particle-in-cell/Monte Carlo model in two-dimensional and axisymmetric geometry: II. Self-bias voltage effects in capacitively coupled plasmas

Plasma Sources Science and Technology

Volumn 20, Issue 3, 2011, Pages

  Jiang, Wei ^a   Wang, Hong Yu ^a,b   Bi, Zhen Hua ^a   Wang, You Nian ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b ANSHAN NORMAL UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AXISYMMETRIC GEOMETRIES; CAPACITIVELY COUPLED PLASMAS; DC VOLTAGE; ELECTRODE AREAS; FINITE LENGTH; FLUID MODELS; KINETIC EFFECT; PARTICLE-IN-CELL; SELF BIAS VOLTAGE; SELF-BIAS;

INDUCTIVELY COUPLED PLASMA; TWO DIMENSIONAL;

BIAS VOLTAGE;

EID: 79957732378     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/20/3/035013     Document Type: Article

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