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Volumn 36, Issue 21, 2003, Pages 2660-2661
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The dual frequency radio-frequency sheath revisited
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC CURRENTS;
NUMERICAL METHODS;
PLASMA DENSITY;
PLASMA OSCILLATIONS;
POTENTIAL ENERGY;
TEMPERATURE;
ELECTRON OSCILLATIONS;
RADIO FREQUENCY SHEATH;
SHEATH DIMENSION;
PLASMA SHEATHS;
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EID: 0242657883
PISSN: 00223727
EISSN: None
Source Type: Journal
DOI: 10.1088/0022-3727/36/21/010 Document Type: Article |
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Times cited : (23)
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References (2)
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