Self-excitation of the plasma series resonance in radio-frequency discharges: An analytical description

Physics of Plasmas

Volumn 13, Issue 12, 2006, Pages

  Czarnetzki, U ^a   Mussenbrock, T ^a   Brinkmann, R P ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; NONLINEAR EQUATIONS; OSCILLATIONS; PLASMA SHEATHS; PLASMAS;

CAPACITVE DISCHARGES; OHMIC BULK; PLASMA SERIES RESONANCE; PSR OSCILLATIONS;

RESONANCE;

EID: 33846069634     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2397043     Document Type: Article

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