Particle-in-cell/Monte Carlo simulation of a capacitively coupled radio frequency Ar/CF4 discharge: Effect of gas composition

Journal of Applied Physics

Volumn 93, Issue 5, 2003, Pages 2369-2379

  Georgieva, V ^a   Bogaerts, A ^a   Gijbels, R ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGED PARTICLES; COMPUTER SIMULATION; GASES; IONS; MONTE CARLO METHODS; PROBABILITY;

GAS MIXTURES;

GLOW DISCHARGES;

EID: 0037349867     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1542920     Document Type: Article

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