Radio-frequency discharges in oxygen: I. Particle-based modelling

Journal of Physics D: Applied Physics

Volumn 40, Issue 21, 2007, Pages 6583-6592

  Bronold, F X ^a   Matyash, K ^b   Tskhakaya, D ^c   Schneider, R ^b   Fehske, H ^a  

^a UNIVERSITY OF GREIFSWALD   (Germany)

^b MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^c UNIVERSITY OF INNSBRUCK   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; ELECTRONS; MATHEMATICAL MODELS; MONTE CARLO METHODS; NATURAL FREQUENCIES; PLASMA APPLICATIONS;

ATOMIC OXYGEN; PLASMA CHEMICAL REACTIONS; RADIO FREQUENCY DISCHARGES; REACTION CROSS SECTION DATA;

MOLECULAR OXYGEN;

EID: 35548934287     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/21/018     Document Type: Article

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