Diagnostics of ballistic electrons in a dc/rf hybrid capacitively coupled discharge

Applied Physics Letters

Volumn 93, Issue 26, 2008, Pages

  Xu, Lin ^a   Chen, Lee ^a   Funk, Merritt ^a   Ranjan, Alok ^a   Hummel, Mike ^a   Bravenec, Ron ^a   Sundararajan, Radha ^a   Economou, Demetre J ^b   Donnelly, Vincent M ^b  

^a TOKYO ELECTRON AMERICA INC   (United States)

^b UNIVERSITY OF HOUSTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; BALLISTICS; ELECTRIC DISCHARGES; ELECTRIC POWER DISTRIBUTION; ELECTROLYSIS; INDUCTIVELY COUPLED PLASMA; ION BEAMS; ION BOMBARDMENT; PLASMA APPLICATIONS;

BALLISTIC ELECTRONS; CAPACITIVELY COUPLED DISCHARGES; CAPACITIVELY COUPLED PLASMA REACTORS; ELECTRON BOMBARDMENTS; ENERGY DISTRIBUTIONS; ION CURRENTS; NEGATIVE BIASES; SUBSTRATE ELECTRODES;

ELECTRONS;

EID: 58149239720     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3062853     Document Type: Article

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