Simulation of dust particles in dual-frequency capacitively coupled silane discharges

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 81, Issue 1, 2010, Pages

  Liu, Xiang Mei ^a   Song, Yuan Hong ^a   Xu, Xiang ^a   Wang, You Nian ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVELY COUPLED; DUAL FREQUENCY; DUST PARTICLE; ELECTRIC SOURCES; ELECTRON DENSITIES; FLUID MODELS; GAS PRESSURES; HIGH FREQUENCY HF; LOW FREQUENCY; NANOPARTICLE DENSITY; NANOPARTICLE FORMATION; NUMERICAL SIMULATION; PLASMA PROPERTIES;

COMPUTER SIMULATION; DUST; ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; NANOPARTICLES;

ELECTRON TEMPERATURE;

EID: 76149113246     PISSN: 15393755     EISSN: 15502376     Source Type: Journal    
DOI: 10.1103/PhysRevE.81.016405     Document Type: Article

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