Hysteresis induced by gap length effects in capacitively coupled plasmas at low pressures

Journal of Physics D: Applied Physics

Volumn 42, Issue 10, 2009, Pages

  Jiang, Wei ^a   Wang, Hong Yu ^a,b   Zhao, Shu Xia ^a   Wang, You Nian ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b ANSHAN NORMAL UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON GAS; CAPACITIVELY COUPLED PLASMAS; ELECTRON ENERGY LOSS; ELECTRON ENERGY PROBABILITY FUNCTIONS; ENERGY DIFFUSION; GAP LENGTH; HEATING MECHANISMS; LOW PRESSURES; SIMULATION RESULT; STEADY STATE;

ARGON; DISSOCIATION; ELECTRON ENERGY LEVELS; ELECTRON TRANSITIONS; ENERGY DISSIPATION; HYSTERESIS;

INDUCTIVELY COUPLED PLASMA;

EID: 70049092839     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/10/102005     Document Type: Article

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