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Volumn 96, Issue 20, 2006, Pages

Collisionless heating in capacitive discharges enhanced by dual-frequency excitation

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC EXCITATION; ELECTRON ABSORPTION; FREQUENCIES; HEATING; MATHEMATICAL MODELS;

EID: 33646771315     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.96.205001     Document Type: Article
Times cited : (173)

References (16)
  • 1
    • 0000468232 scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.65.996
    • V.A. Godyak and R.B. Piejak, Phys. Rev. Lett. 65, 996 (1990). PRLTAO 0031-9007 10.1103/PhysRevLett.65.996
    • (1990) Phys. Rev. Lett. , vol.65 , pp. 996
    • Godyak, V.A.1    Piejak, R.B.2
  • 2
    • 0002575923 scopus 로고
    • JAPIAU 0021-8979 10.1063/1.335395
    • O.A. Popov and V.A. Godyak, J. Appl. Phys. 57, 53 (1985). JAPIAU 0021-8979 10.1063/1.335395
    • (1985) J. Appl. Phys. , vol.57 , pp. 53
    • Popov, O.A.1    Godyak, V.A.2
  • 3
    • 19544389650 scopus 로고    scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.93.085003
    • H.C. Kim and J.K. Lee, Phys. Rev. Lett. 93, 085003 (2004). PRLTAO 0031-9007 10.1103/PhysRevLett.93.085003
    • (2004) Phys. Rev. Lett. , vol.93 , pp. 085003
    • Kim, H.C.1    Lee, J.K.2
  • 5
    • 0344980603 scopus 로고    scopus 로고
    • PHPAEN 1070-664X 10.1063/1.1621000
    • H.C. Kim, J.K. Lee, and J.W. Shon, Phys. Plasmas 10, 4545 (2003). PHPAEN 1070-664X 10.1063/1.1621000
    • (2003) Phys. Plasmas , vol.10 , pp. 4545
    • Kim, H.C.1    Lee, J.K.2    Shon, J.W.3
  • 6
    • 31044436681 scopus 로고    scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.87.135004
    • G. Gozadinos, M.M. Turner, and D. Vender, Phys. Rev. Lett. 87, 135004 (2001). PRLTAO 0031-9007 10.1103/PhysRevLett.87.135004
    • (2001) Phys. Rev. Lett. , vol.87 , pp. 135004
    • Gozadinos, G.1    Turner, M.M.2    Vender, D.3
  • 7
    • 0000509421 scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.75.1312
    • M.M. Turner, Phys. Rev. Lett. 75, 1312 (1995). PRLTAO 0031-9007 10.1103/PhysRevLett.75.1312
    • (1995) Phys. Rev. Lett. , vol.75 , pp. 1312
    • Turner, M.M.1
  • 9
    • 0024131141 scopus 로고
    • ITPSBD 0093-3813 10.1109/27.16552
    • M.A. Lieberman, IEEE Trans. Plasma Sci. 16, 638 (1988). ITPSBD 0093-3813 10.1109/27.16552
    • (1988) IEEE Trans. Plasma Sci. , vol.16 , pp. 638
    • Lieberman, M.A.1
  • 10
    • 4143123767 scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.66.1469
    • M. Surendra and D.B. Graves, Phys. Rev. Lett. 66, 1469 (1991). PRLTAO 0031-9007 10.1103/PhysRevLett.66.1469
    • (1991) Phys. Rev. Lett. , vol.66 , pp. 1469
    • Surendra, M.1    Graves, D.B.2
  • 11
    • 0037164997 scopus 로고    scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.89.265006
    • I.D. Kaganovich, Phys. Rev. Lett. 89, 265006 (2002). PRLTAO 0031-9007 10.1103/PhysRevLett.89.265006
    • (2002) Phys. Rev. Lett. , vol.89 , pp. 265006
    • Kaganovich, I.D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.