Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

Journal of Physics D: Applied Physics

Volumn 40, Issue 22, 2007, Pages 7008-7018

  Schulze, J ^a   Gans, T ^a,c   O'Connell, D ^a   Czarnetzki, U ^a   Ellingboe, A R ^b   Turner, M M ^b  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b DUBLIN CITY UNIVERSITY   (Ireland)

^c QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRIC FREQUENCY CONTROL; EXCITATION ENERGY; OPTICAL EMISSION SPECTROSCOPY;

ELECTRON ENERGY DISTRIBUTION FUNCTIONS; ENERGETIC ELECTRONS; GAS ADMIXTURES; PHASE RESOLVED PLASMAS; SPACE RESOLVED PLASMAS; SPATIAL RESOLUTIONS;

PLASMA APPLICATIONS;

EID: 36448979252     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/22/022     Document Type: Article

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