Experimental and theoretical study of ion energy distribution function in single and dual frequency RF discharges

IEEE Transactions on Plasma Science

Volumn 35, Issue 5 I, 2007, Pages 1229-1240

  Rakhimova, Tatyana V ^a   Braginsky, Oleg V ^a   Ivanov, Vladimir V ^a   Kovalev, Alexander S ^a   Lopaev, Dmitry V ^a   Mankelevich, Yuri A ^a   Olevanov, Michael A ^a   Proshina, Olga V ^a   Rakhimov, Alexander T ^a   Vasilieva, Anna N ^a   Voloshin, Dmitry G ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

Dual frequency (DF) capacitive coupled radio frequency (RF) plasma; IEDF measurement; Ion energy distribution functions (IEDFs) analytical expression; Particle in cell (PIC) simulation; Semianalytical IEDF simulation

Indexed keywords

CHARGE DISTRIBUTION; COMPUTER SIMULATION; DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ELECTRODES; IONS; MONTE CARLO METHODS;

ION ENERGY DISTRIBUTION FUNCTIONS (IEDFS); PARTICLE-IN-CELL (PIC) SIMULATION; RADIO FREQUENCY DISCHARGES; RADIO-FREQUENCY (RF) PLASMA;

PLASMA COLLISION PROCESSES;

EID: 35348823076     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2007.905201     Document Type: Article

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