Scaling laws for dual radio-frequency capacitively coupled discharges

Physics of Plasmas

Volumn 12, Issue 10, 2005, Pages 1-4

  Chung, T H ^a  

^a Dong A University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ELECTRIC POTENTIAL; MATHEMATICAL MODELS; PLASMA DENSITY; PLASMA DEVICES; SET THEORY;

DUAL RADIO-FREQUENCY CAPACITIVELY COUPLED DISCHARGES; PLASMA POTENTIAL; SCALING LAWS;

PLASMAS;

EID: 27644503983     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2121327     Document Type: Article

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