Numerical investigation of ion energy distribution and ion angle distribution in a dual-frequency capacitively coupled plasma with a hybrid model

Physics of Plasmas

Volumn 14, Issue 11, 2007, Pages

  Wang, Shuai ^a   Xu, Xiang ^a   Wang, You Nian ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR DISTRIBUTION; ARGON; CAPACITANCE; ELECTRIC POTENTIAL; ELECTRODES; MONTE CARLO METHODS; ONE DIMENSIONAL;

BIMODAL SHAPE; FAST NEUTRALS; ION ANGLE DISTRIBUTION; LOW-FREQUENCY (LF) SOURCES;

PLASMA SOURCES;

EID: 36649027263     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2780136     Document Type: Article

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