Dual radio-frequency discharges: Effective frequency concept and effective frequency transition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 4, 2005, Pages 651-657

  Kim, H C ^a   Lee, J K ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ION BOMBARDMENT;

CAPACITIVELY COUPLED PLASMAS (CCP); ENERGY DISTRIBUTION FUNCTIONS; SINGLE-FREQUENCY (SF);

PLASMA APPLICATIONS;

EID: 25144519152     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1931683     Document Type: Article

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