Study on the dual frequency capacitively coupled plasmas by the particle-in-cell/Monte Carlo method

IEEE Transactions on Plasma Science

Volumn 31, Issue 4 II, 2003, Pages 638-644

  Wakayama, Go ^a   Nanbu, Kenichi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Capacitively coupled; Dual frequency; Ion energy distribution (IED); Particle modeling; Processing plasma

Indexed keywords

ARGON; COMPUTER SIMULATION; ELECTRIC DISCHARGES; ELECTRODES; ION BOMBARDMENT; MONTE CARLO METHODS; PLASMA COLLISION PROCESSES; PLASMA SIMULATION;

CAPACITIVELY COUPLED PLASMAS (CCP);

PLASMA THEORY;

EID: 0041426369     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2003.815471     Document Type: Article

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