The impact of frequency mixing on sheath properties: Ion energy distribution and V dc/ V rf interaction

Journal of Applied Physics

Volumn 97, Issue 10, 2005, Pages

  Shannon, Steven ^a   Hoffman, Daniel ^a   Yang, Jang Gyoo ^a   Paterson, Alex ^a   Holland, John ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FREQUENCY-MIXING INTERACTIONS; ION ENERGY; SHEATH PARAMETERS; SHEATH PROPERTIES;

APPROXIMATION THEORY; ELECTRIC POTENTIAL; ELECTRODES; FUNCTIONS; MATHEMATICAL MODELS; PLASMAS;

CARRIER CONCENTRATION;

EID: 20944439939     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1905798     Document Type: Article

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