On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric

Journal of Physics D: Applied Physics

Volumn 41, Issue 16, 2008, Pages

  Heil, Brian G ^a   Czarnetzki, Uwe ^a   Brinkmann, Ralf Peter ^a   Mussenbrock, Thomas ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DISCHARGE (FLUID MECHANICS); FLUID MECHANICS; FLUXES; GROUNDING ELECTRODES; IONS; PLASMA DENSITY; PLASMAS;

DEGREE OF CONTROL; DISCHARGE PARAMETERS; DUAL-FREQUENCY; EVEN HARMONICS; FUNDAMENTAL PROBLEMS; ION ENERGIES; ION FLUXES; LINEAR FUNCTIONS; MULTI-FREQUENCY; PARTICLE FLUXES; PHASE ANGLES; RF VOLTAGE; SECOND HARMONIC; SELF BIASING; VOLTAGE WAVE FORMS;

ELECTRIC DISCHARGES;

EID: 49749112887     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/16/165202     Document Type: Article

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