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Volumn 9780521763004, Issue , 2011, Pages 1-385

Physics of radio-frequency plasmas

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT SOURCES; PROPULSION; SPACECRAFT PROPULSION; STUDENTS; WAVE PLASMA INTERACTIONS;

EID: 84925089126     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1017/CBO9780511974342     Document Type: Book
Times cited : (779)

References (241)
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    • 85032399115 scopus 로고    scopus 로고
    • Epic simulations
    • Grenoble, France, July
    • D. Vender and M. M. Turner. Epic simulations. In Invited Paper, 16th ESCAMPIG and 5th ICRP Proceedings, Vol. 2, p. 3, Grenoble, France, July 2002.
    • (2002) Invited , vol.2 , pp. 3
    • Vender, D.1    Turner, M.M.2
  • 96
    • 33846113352 scopus 로고    scopus 로고
    • T. Gans et al.Appl. Phys. Lett., 89:261502, 2006.
    • (2006) Appl. Phys , pp. 89
    • Gans, T.1
  • 98
    • 84925085793 scopus 로고    scopus 로고
    • PhD, thesis, Ecole Polytechnique, Palaiseau, France, November
    • P. Levif. Excitation multifréquence dans les decharges capacitives utilisées pour la gravure en microélectronique. PhD thesis, Ecole Polytechnique, Palaiseau, France, November 2007.
    • (2007) Excitation
    • Levif, P.1
  • 156
    • 0004278048 scopus 로고
    • John Wiley & Sons, New York
    • T. H. Stix. Waves in Plasmas. John Wiley & Sons, New York, 1992.
    • (1992) Waves in Plasmas
    • Stix, T.H.1
  • 160
    • 0000732666 scopus 로고
    • Rf plugging of a high-density plasma
    • T. Watari et al. Rf plugging of a high-density plasma. Phys. Fluids, 21:2076, 1978.
    • (1978) Phys. Fluids , vol.21 , pp. 2076
    • Watari, T.1
  • 211


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.