Internal sheaths in electronegative discharges

Journal of Applied Physics

Volumn 86, Issue 8, 1999, Pages 4142-4153

  Kouznetsov, I G ^a   Lichtenberg, A J ^a   Lieberman, M A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001761303     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371339     Document Type: Article

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