Modeling the transitions from capacitive to inductive to wave-sustained rf discharges

Journal De Physique. IV : JP

Volumn 8, Issue 7, 1998, Pages

  Lieberman, M A ^a   Boswell, R W ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; HELICONS; HYSTERESIS; THIN FILMS;

ELECTRON ENERGY BALANCE; HELICON ELECTRON ENERGY DEPOSITION;

PLASMA SOURCES;

EID: 0010643157     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:1998712     Document Type: Article

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