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Volumn 21, Issue 10, 1988, Pages 1496-1503

Ion and electron energy analysis at a surface in an RF discharge

Author keywords

[No Author keywords available]

Indexed keywords

COLLISIONAL SCATTERING; ION VELOCITY DISTRIBUTION; PLASMA ETCHING; RF DISCHARGE;

EID: 0024092852     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/21/10/005     Document Type: Article
Times cited : (119)

References (21)
  • 2
    • 84956144702 scopus 로고
    • B E Keen (Inst. Phys. Conf. Ser. 20)
    • Allen J E 1974 in Plasma Physics ed. B E Keen (Inst. Phys. Conf. Ser. 20)
    • (1974) Plasma Physics
    • Allen, J.E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.