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Volumn 21, Issue 10, 1988, Pages 1496-1503
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Ion and electron energy analysis at a surface in an RF discharge
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Author keywords
[No Author keywords available]
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Indexed keywords
COLLISIONAL SCATTERING;
ION VELOCITY DISTRIBUTION;
PLASMA ETCHING;
RF DISCHARGE;
ELECTRONS--ENERGY ANALYZERS;
ETCHING;
IONS--ENERGY ANALYZERS;
PLASMAS;
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EID: 0024092852
PISSN: 00223727
EISSN: 13616463
Source Type: Journal
DOI: 10.1088/0022-3727/21/10/005 Document Type: Article |
Times cited : (119)
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References (21)
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