Stochastic heating in asymmetric capacitively coupled RF discharges

Journal of Physics D: Applied Physics

Volumn 41, Issue 19, 2008, Pages

  Schulze, J ^a   Heil, B G ^a   Luggenholscher D ^a   Brinkmann, R P ^a   Czarnetzki, U ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SPECTROSCOPY; ATOMS; DISCHARGE (FLUID MECHANICS); DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ELECTRIC FIELD EFFECTS; ELECTRIC FIELDS; ELECTRON BEAMS; ELECTRON ENERGY ANALYZERS; ELECTRON SCATTERING; ELECTRONS; EMISSION SPECTROSCOPY; FLUID MECHANICS; HEATING; INERT GASES; KRYPTON; LANGMUIR PROBES; LIGHT EMISSION; MAGNETRONS; MOLECULAR SPECTROSCOPY; OPTICAL EMISSION SPECTROSCOPY; PLASMA DIAGNOSTICS; PLASMAS; SPACE PROBES; STOCHASTIC PROGRAMMING;

ANALYTICAL MODELLING; CAPACITIVELY COUPLED; CHAMBER WALLS; CURRENT WAVEFORMS; ELECTRON DENSITIES; ELECTRON DYNAMICS; ELECTRON ENERGY DISTRIBUTION FUNCTION; ELECTRON MEAN ENERGY; ENERGETIC ELECTRONS; HIGH FREQUENCY OSCILLATIONS; INPUT PARAMETERS; LANGMUIR; LANGMUIR PROBE MEASUREMENTS; LOW PRESSURES; MONTE CARLO MODELLING; NON-SINUSOIDAL; PHASE RESOLVED OPTICAL EMISSION SPECTROSCOPY; RADIO FREQUENCY DISCHARGES; RF DISCHARGES; RF VOLTAGE; SERIES RESONANCE; SHEATH EXPANSION; STOCHASTIC HEATING; TIME AVERAGING;

STOCHASTIC MODELS;

EID: 53349091953     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/19/195212     Document Type: Article

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