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Volumn 38, Issue 7 B, 1999, Pages 4275-4279
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Ferrite core effects in a 13.56 MHz inductively coupled plasma
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CARRIER CONCENTRATION;
EDDY CURRENTS;
ELECTRIC LOSSES;
FERRITES;
INDUCTANCE MEASUREMENT;
MAGNETIC CORES;
PLASMA DENSITY;
TRANSFORMER MAGNETIC CIRCUITS;
COPPER COILS;
FERRITE CORE;
INDUCTIVELY COUPLED PLASMA;
PLASMA SOURCES;
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EID: 0033157877
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.38.4275 Document Type: Article |
Times cited : (11)
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References (9)
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