Optical and electrical diagnostics of fluorocarbon plasma etching processes

Plasma Sources Science and Technology

Volumn 8, Issue 2, 1999, Pages 249-257

  Booth, Jean Paul ^a  

^a UNIV GRENOBLE ALPES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORESCENCE; LASER BEAM EFFECTS; MASS SPECTROMETERS; PLASMA ETCHING; PLASMA POLYMERIZATION; SILICA;

LASER-INDUCED FLUORESCENCE (LIF);

FLUOROCARBONS;

EID: 0032640226     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/8/2/005     Document Type: Article

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