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Plasma Sources Science and Technology

Volumn 11, Issue 3 A, 2002, Pages

Electronegative plasmas - Why are they so different?

(1) Franklin, R N a

a OPEN UNIVERSITY (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CARRIER MOBILITY; ELECTRON TRANSPORT PROPERTIES; ELECTRONS; NEGATIVE IONS; PLASMA COLLISION PROCESSES; TEMPERATURE;

ELECTRON TEMPERATURE; ELECTRONEGATIVE PLASMA; ION DENSITY; ION MOBILITY;

PLASMA SHEATHS;

EID: 0036671924 PISSN: 09630252 EISSN: None Source Type: Journal
DOI: 10.1088/0963-0252/11/3A/304 Document Type: Conference Paper

Times cited : (107)

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