Double layer formation in the expanding region of an inductively coupled electronegative plasma

Applied Physics Letters

Volumn 86, Issue 9, 2005, Pages 1-3

  Plihon, N ^a   Corr, C S ^a   Chabert, P ^a  

^a ECOLE POLYTECHNIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CARRIER CONCENTRATION; DIFFUSION; ELECTRIC CHARGE; MULTILAYERS; PRESSURE EFFECTS; THERMAL EFFECTS;

DOUBLE LAYER FORMATION; ELECTRONEGATIVE PLASMA; GAS MIXTURES; INTERNAL BOUNDARY;

INDUCTIVELY COUPLED PLASMA;

EID: 17044422640     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1869533     Document Type: Article

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