Inductive heating and E to H transitions in high frequency capacitive discharges

Plasma Sources Science and Technology

Volumn 15, Issue 2, 2006, Pages

  Chabert, P ^a   Raimbault, J L ^a   Levif, P ^a   Rax, J M ^a   Lieberman, M A ^b  

^a ECOLE POLYTECHNIQUE   (France)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC EXCITATION; ELECTRODES; ELECTROMAGNETIC FIELD EFFECTS; ELECTROSTATICS; HEATING;

E TO H TRANSITIONS; HIGH FREQUENCY CAPACITIVE DISCHARGES; INDUCTIVE HEATING; LUMPED-ELEMENT CIRCUIT MODELS;

ELECTRIC DISCHARGES;

EID: 33646342746     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/15/2/S15     Document Type: Conference Paper

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