Diagnostics of the plasma series resonance effect in radio-frequency discharges

Journal of Physics: Conference Series

Volumn 86, Issue 1, 2007, Pages

  Schulze, J ^a   Kampschulte, T ^a,b   Luggenholscher D ^a   Czarnetzki, U ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b UNIVERSITY OF BONN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36348982095     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/86/1/012010     Document Type: Article

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