On nonlinear effects in inductively coupled plasmas

Physics of Plasmas

Volumn 7, Issue 11, 2000, Pages 4755-4762

  Smolyakov, A ^a   Godyak, V ^b   Duffy, A ^a  

^a UNIVERSITY OF SASKATCHEWAN   (Canada)

^b OSRAM SYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001757746     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1311803     Document Type: Article

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