Improved volume-averaged model for steady and pulsed-power electronegative discharges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 6, 2006, Pages 2025-2040

  Kim, Sungjin ^a   Lieberman, M A ^a   Lichtenberg, A J ^a   Gudmundsson, J T ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF ICELAND   (Iceland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONEGATIVE (EN) PLASMAS; GAS PRESSURES; OXYGEN DISCHARGES; SURFACE LOSS FACTORS;

CARRIER CONCENTRATION; ELECTRIC FIELD EFFECTS; IONS; MATHEMATICAL MODELS; PARAMETER ESTIMATION; PRESSURE EFFECTS; SURFACE PROPERTIES;

ELECTRIC DISCHARGES;

EID: 33750937932     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2345645     Document Type: Article

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